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Sensors & Transducers Journal 2007 2000-2002 S&T e-Digest Contents
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Vol. 88, Issue 2, February 2008, pp.59-65
Dilip Kumar Ghara, Debdulal Saha and Kamalendu Sengupta*
Sensor and Actuator Division, Central Glass & Ceramic Research Institute,
Jadavpur, Kolkata-700 032, India
*E-mail: kamalendusengupta@yahoo.co.in, dilipghara@gmail.com
Received: 6 December 2007 /Accepted: 22 February 2008 /Published: 26 February 2008
Abstract: A novel trace moisture analyzer is presented comprising a capacitive nanoporous film of metal oxide sensor and electronics. The change in capacity of the sensor is due to absorption of water vapor by the pores. A simple capacitance measuring electronics is developed which can detect any change in capacitance and correlates to ambient humidity. The circuit can minimize the parasitic earth capacitance. The non linear response of the sensor is linearized with a micro-controller linearizing circuit. The experimental result shows a resolution of -4°C DP and accuracy within 2%.
Keywords: Porous α-Al2O3, Micro controller, Trace moisture sensor, Thin film
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