Gas Sensing of Fluorine Doped Tin Oxide Thin Films Prepared by Spray Pyrolysis

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Vol. 92, Issue 5, May 2008, pp. 55-60

Gas Sensing of Fluorine Doped Tin Oxide Thin Films Prepared by Spray Pyrolysis

A. A. YADAV^a*, E. U. MASUMDAR^a, A. V. MOHOLKAR ^b, K. Y. RAJPURE ^b, C. H. BHOSALE ^b

^a Department of Photonics, Rajarshi Shahu Mahavidyalaya, Latur 413215 (M.S.) India

^bElectrochemical Materials Laboratory, Department of Physics, Shivaji University, Kolhapur 416004, India

*Tel.: +91-9975470990

E-mail: aay_physics@yahoo.co.in, abhijit_physuk@yahoo.co.in

Received: 13 April 2008 /Accepted: 20 May 2008 /Published: 26 May 2008

Abstract: Fluorine doped tin oxide (F: SnO2) films have been prepared onto the amorphous glass substrates by a spray pyrolysis. XRD studies reveal that the material deposited is polycrystalline SnO₂ and have tetragonal structure. It is observed that films are highly orientated along (200) direction. The direct optical band gap energy for the F: SnO2 films are found to be 4.15 eV. Gas sensing properties of the sensor were checked against combustible gases like H₂, CO₂ CO, C₃H₈, CH₄.The H₂ sensitivity of the F-doped SnO2 sensor was found to be increased. The increase in the sensitivity is discussed in terms of increased resistivity and reduced permeation of gaseous oxygen into the underlying sensing layer due to the surface modification of the sensor.

Keywords: Fluorine doped tin oxide, XRD, band gap energy, sensor

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