Micro-calorimetric Flow Rate Measurement Device for Microfluidic Applications

Sensors & Transducers Journal

(ISSN: 2306-8515, e-ISSN 1726-5479)

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Vol. 237, Issue 9-10, September-October 2019, pp. 95-102

Micro-calorimetric Flow Rate Measurement Device for Microfluidic Applications

Bilel Neji

College of Engineering and Technology, American University of the Middle East, Kuwait
Tel.: +965 22251400, fax: +965 26548484

E-mail: bilel.neji@aum.edu.kw

Received: 30 August 2019 /Accepted: 27 September 2019 /Published: 30 November 2019

Abstract: With the recent advances in biology and medical fields, nano and micro sensors became essential for accurate measurements and diagnosis. Miniaturization of such critical devices has become essential to operate in micro scale circuits, including microfluidic devices that can be used for applications including preclinical diagnosis, drug monitoring and delivery, and lab on chip devices. Several techniques have been used to measure fluid flow rate. These techniques can be classified as thermal and non-thermal. This research focuses on calorimetric flow rate sensors, which is a sub-type of thermal flow rate sensors. This paper presents the design, microfabrication and characterization of a micro-calorimetric flow rate sensor. The device is capable of measuring fluid flow rates starting between and . The sensing part of the device, excluding the power supply, measures by . The channel width and height are both equal to . Experiment results show that measured output voltages ranging from to , correspond to flow rates between and . The device flow rate measurement error is around , and the device response time is less than 3 seconds.

Keywords: Micro-calorimetric measurement, Microfluidics, Fluid flow rate, Heat transfer, Temperature sensing, Microfabrication.

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