Sensors & Transducers Journal
(ISSN 1726- 5479)
Vol. 99, Issue 12, December 2008, pp.18-24
Reflective Type Small-Angle Sensor Based on Multiple Total Internal Reflections in Heterodyne Interferometry
1,*Shinn-Fwu Wang, 2Po-Chin Chiu, 2Tsung-Hsun Yang
Department of Electronic Engineering, Ching Yun University,
No.229, Chien-Hsin Rd., Jhongli City, Taoyuan, 320, Taiwan, R.O.C.
Department of Optics and Photonics,
National Central University,
No.300, Jhongda Rd., Jhongli City, Taoyuan, 320, Taiwan, R.O.C.
*Tel.: +886-3-4581196 ext 5113
Received: 26 November 2008 /Accepted: 22 December 2008 /Published: 30 December 2008
Abstract: A reflective type small-angle sensor based on the multiple total internal reflections (MTIRs) in heterodyne interferometry is proposed. In the paper, we try to measure the phase difference variation between s- and p-polarizations due to MTIRs. The phase difference variation depends on the incident angle. Therefore, only evaluating the phase difference variation can perform small-angle measurement. The resolution of the method can reach 5.5E-7 radian. The method has some merits, e.g., a simple optical setup, easy operation, high measurement accuracy, high resolution, rapid measurement, and high stability etc. and its feasibility is demonstrated.
Keywords: Multiple total internal reflections (MTIRs), Heterodyne interferometry (HI), Small-angle measurement
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