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Vol. 54, Issue 4, April 2005, pp. 310-319




Environmental Influences on SMO Sensorsí Performance



Jian-Wei GONG1, Quan-Fang CHEN1*, Ming-Ren LIAN2, Nen-Chin LIU2


1Department of Mechanical, Material & Aerospace Engineering,

University of Central Florida, Orlando, FL, 32826, U.S.A.

Ph. (407) 823 2152 Fax: (407) 823 0208; E-mail: jgong@ucf.edu


6600 Congress Avenue, Boca Raton, FL, 33487 U.S.A.

 Ph. (561) 912 6587; fax: (561) 912 6822; E-mail: mlian@tycoint.com

* To whom correspondence should be addressed

E-mail: qchen@mail.ucf.edu



Received: 19 March 2005 / Accepted: 12 April 2005  / Published: 20 April 2005


Abstract: Micromachined semiconductor metal oxide (SMO) gas sensors have good prospect of being solution as future gas sensor technology in terms of sensitivity, robustness, simple signal processing, low production cost and small size. However, there are some challenges for the  commercialization of SMO sensor to meet both performance-related and reliability-related requirements, especially false alarm problems caused by environmental induced drifts and shifts. Several environmental influence factors that affect SMO sensorís performance, in terms of temperature variation, relative humidity and possibly others like light and oxygen partial pressure, are discussed in this paper. Principles behinds these influences are presented and schemes of eliminating these influences are reviewed and proposed.


Keywords: MEMS, SMO sensors, metal oxide gas sensors, ambient temperature, relative humidity, feedback control


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