Sensors & Transducers Journal (ISSN 1726- 5479) |
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Sensors & Transducers Journal 2008 Sensors & Transducers Journal 2007 2000-2002 S&T e-Digest Contents
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Vol. 105, Issue 6, June 2009, pp.18-25
New Type Small-angle Sensor Based on the TIR and SPR Theories in Heterodyne Interferomery
Department of Electronic Engineering, Ching Yun University,
No.229, Chien-Hsin Rd., Jhongli City, Taoyuan, 320, Taiwan, R.O.C.
*Tel.: +886-3-4581196 ext 5113
E-mail: sfwang@cyu.edu.tw
Received: 15 April 2009 /Accepted: 22 June 2009 /Published: 30 June 2009
Abstract: In this paper, a new type small-angle sensor based on the total internal reflection (TIR) and surface plasmon resonance (SPR) theories in heterodyne interferomery is proposed. With the small-displacement sensor, a small rotation angle can be obtained only by measuring the variation in phase difference between s- and p-polarization states. The best theoretical sensitivity of the small-angle sensor is 2x10-4 degree/degree. And its resolution can reach 1x10-7 radian. The sensor has some merits, e.g., a simple optical setup, high resolution, high sensitivity, rapid measurement.
Keywords: Total internal reflection (TIR), Surface plasmon resonance (SPR), Kretchmann’s configuration, Heterodyne interferometry (HI), Small-angle measurement
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