Sensors & Transducers Journal
(ISSN 1726- 5479)
Vol. 107, Issue 8, August 2009, pp. 64-76
Development of a Surface Micromachined On-Chip Flat Disk Micropump
M. I. KILANI1, A. T. AL-HALHOULI2, P. C. GALAMBOS3, Y. S. HAIK4,
A. AL-SALAYMEH5* and S. BÜTTGENBACH2
Engineering Department, University of Jordan, Amman, 11942 Jordan
2Institute for Microtechnology, Technical University Braunschweig, Alte Salzdahlumer Str. 203, 38124 Braunschweig, Germany
E-mail: firstname.lastname@example.org, email@example.com
3Intelligent Micromachine Department, Sandia National Laboratories, Albuquerque, NM 87185, USA E-mail: firstname.lastname@example.org
Engineering Department, United Arab Emirates University, Al-Ain, UAE
Engineering Department, Faculty of Engineering and Technology, University of
Jordan, Amman, 11942 Jordan, Fax: +96265355588,
Received: 13 June 2009 /Accepted: 15 August 2009 /Published: 25 August 2009
Abstract: The paper presents research progress in the development of a surface micromachined flat disk micropump which employs the viscous and centrifugal effects acting on a layer of fluid sandwiched between a rotating flat disk and a stationary plate. The pump is fabricated monolithically on-chip using Sandia’s Ultraplanar Multilevel MEMS Technology (SUMMiT™) where an electrostatic comb-drive Torsional Ratcheting Actuator (TRA) drives the flat disk through a geared transmission. The paper reviews available analytical models for flow geometries similar to that of the described pump, and presents a set of experiments which depict its performance and possible failure modes. Those experiments highlight future research directions in the development of electrostatically-actuated, CMOS-compatible, surface micromachined pumps.
Keywords: Flat disk micropump, viscous micropumps, surface micromachining, SUMMiT™.
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