On-line Magazine 'Sensors & Transducers' (S&T e-Digest)

    (ISSN 1726- 5479)

Vol. 69, Issue 7, July 2006, pp. 622-628

Pull-in Instability Investigation of Circular Micro Pump Subjected to Nonlinear Electrostatic Force

Pouria Soleymani, Hamed Sadeghian, Ahmadali Tahmasebi, Ghader Rezazadeh

Mechanical Engineering Department, Urmia University, Iran

E-mail: g.rezazadeh@mail.urmia.ac.ir

Received:  14 July 2006   Accepted: 19 July 2006   Published: 25 July 2006

Abstract. Electrostaticaly actuated circular micro plates are used in the many MEM devices such as micropumps and optical switches. All such systems exhibit an instability phenomenon, which it is known as the "pull-in" instability. In this paper a distributed model has been used to investigate the pull-in instability of circular plate subjected to nonlinear distributed electrostatic force. The governing nonlinear differential equation of the plate subjected to non-uniform electrostatic pressure has been derived and solved using finite difference method. The effects of different parameters such as: residual stress, radius and thickness of the plate and initial gap have been studied. The obtained results have been compared with the existing results and were in tune.

Keywords: MEMS; Pull-in Instability; Micro Plate; Finite difference method

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