On-line Magazine 'Sensors & Transducers' (S&T e-Digest)

    (ISSN 1726- 5479)

Vol. 72, Issue 10, October 2006, pp. 754-760

MEMS Capacitive Thermal Sensor Sensitivity Investigation Using Full Factorial Design Method

¹Ghader Rezazadeh, ²Shahriar Kouravand, ³Mehdi Mehrban

^{1, 2, 3} Mech. Eng. Dept. Urmia University, Urmia, IRAN, ¹Tel: +98-914-145-1407

¹Fax: +98-441-277-7022, ¹E-mail: g.rezazadeh@mail.urmia.ac.ir

Received: 23 September 2006   /Accepted: 18 October 2006   /Published: 23 October 2006

Abstract: In this paper a sensitivity of MEMS capacitive thermal sensors based on deflection of a bimetallic cantilever beam was investigated. Using design of experiment method, and applying a 2⁵ factorial design the effect of factors in this sensor was calculated and main factors that affect on sensor’s sensitivity were identified. Analysis of variance for the main factors of design and their interactions were studied for their significance.

Keywords: MEMS; Bimetallic cantilever; Full factorial design; Sensitivity; Thermal Sensor

Click <here> or title of paper to download the full pages article (419 K)

1999 - 2006 Copyright ©, International Frequency Sensor Association (IFSA). All Rights Reserved.

Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - e-Shop - Membership

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - Site Map