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Vol. 72, Issue 10, October 2006, pp. 754-760




MEMS Capacitive Thermal Sensor Sensitivity Investigation Using Full Factorial Design Method


1Ghader Rezazadeh, 2Shahriar Kouravand, 3Mehdi Mehrban

1, 2, 3 Mech. Eng. Dept. Urmia University, Urmia, IRAN, 1Tel: +98-914-145-1407

1Fax: +98-441-277-7022, 1E-mail: g.rezazadeh@mail.urmia.ac.ir


Received: 23 September 2006   /Accepted: 18 October 2006   /Published: 23 October 2006



Abstract: In this paper a sensitivity of MEMS capacitive thermal sensors based on deflection of a bimetallic cantilever beam was investigated. Using design of experiment method, and applying a 25 factorial design the effect of factors in this sensor was calculated and main factors that affect on sensorís sensitivity were identified. Analysis of variance for the main factors of design and their interactions were studied for their significance.


Keywords: MEMS; Bimetallic cantilever; Full factorial design; Sensitivity; Thermal Sensor


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