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Vol. 137, Issue 2, February 2012, pp. 22-35




Mechanistic Modeling, Simulation and Control of Humidity Sensor Characteristics


Vinod Kumar KHANNA

MEMS & Microsensors, Solid-State Devices Division, CSIR-Central Electronics Engineering Research Institute, Pilani-333031 (Rajasthan), India

Tel: +91-1596-252353, fax: +91-1596-242294

Email: vkk_ceeri@yahoo.com



Received: 29 November 2011   /Accepted: 14 February 2012   /Published: 28 February 2012

Digital Sensors and Sensor Sysstems


Abstract: Humidity sensors are required for diverse applications in low and high humidity ranges. Also, fast-response humidity sensors are sometimes needed. For this purpose, it is necessary to understand the hygroscopic influences and physico-chemical mechanisms underlying sensor operation as well as their correlation with the terminal properties of sensors. Several models and theories of sensors have been proposed for interpretation of their behaviour. This paper comprehensively surveys the available models and points out the utilization of selected models for tailoring sensor characteristics in accordance with intended application. Ionic salt doping is a useful technique for improving the sensitivity, linearity and hysteresis of humidity sensor characteristics.


Keywords: Humidity sensor, Capacitor, Modeling, Simulation, Physico-chemical mechanisms



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