bullet Sensors & Transducers Journal

    (ISSN 1726- 5479)


2008 e-Impact Factor

25 Top Downloaded Articles

Journal Subscription 2011

Editorial Calendar 2011

Submit an Article

Editorial Board

Current Issue

Special Issue of S&T, February 2011

Sensors & Transducers Journal 2010

Sensors & Transducers Journal 2009

Sensors & Transducers Journal 2008

Sensors & Transducers Journal 2007

2000-2002 S&T e-Digest Contents

2003 S&T e-Digest Contents

2004 S&T e-Digest Contents

2005 S&T e-Digest Contents

2006 S&T e-Digest Contents


Best Articles 2009




Vol. 10, Special Issue, February 2011, pp.141-150



Fabrication and Characterization of Ethanol Sensor Based on RF Sputtered ITO Films


aH. J. Pandya, b,*Sudhir Chandra and aA. L. Vyas

aInstrument Design Development Centre, Indian Institute of Technology Delhi,

bCentre for Applied Research in Electronics, Indian Institute of Technology Delhi,

Hauz Khas, New Delhi, 110016, India

Tel.: *+91-11-26591105, +91-11-26596209, fax: +91-11-26596219

E-mail: hjpele@yahoo.com, alvyas@iddc.iitd.ac.in, schandra@care.iitd.ernet.in



Received: 28 October 2010   /Accepted: 11 January 2011   /Published: 8 February 2011


Abstract: In the present work, we report the fabrication and testing of a sensor for the detection of ethanol vapours using RF magnetron sputter deposited ITO thin film on Si substrate. The principle of operation is the change of resistance of ITO film on exposure to ethanol vapours. The ITO films were prepared by RF magnetron sputtering process. The films were subsequently annealed at 450 C for 1h in air. The films were extensively characterized for their structural properties using XRD, SEM and TEM measurements. Two aluminium pads of 7 mm 4 mm size were formed using lift-off technique for electrical contacts and the sensing area was kept to be 3 mm 3 mm. The stability of the sensor in terms of its resistance with aging and temperature cycling was also investigated. The dynamic response of the sensor was evaluated using a simple test set-up. It is shown that sputtering parameters such as RF power strongly affect the sensitivity of detection.


Keywords: Indium tin oxide, RF sputtering, Ethanol sensor, VOC detection


Acrobat reader logo Click <here> or title of paper to download the full pages article (2.38 Mb)



Read more about Chemical Sensors






1999 - 2011 Copyright , International Frequency Sensor Association (IFSA). All Rights Reserved.

Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - Membership - Submit Press Release - Twitter

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - e-Shop - Site Map - Video