bullet Sensors & Transducers Journal

    (ISSN 1726- 5479)



2008 e-Impact Factor

25 Top Downloaded Articles

Journal Subscription 2010

Editorial Calendar 2009

Submit an Article

Editorial Board

Current Issue

Sensors & Transducers journal's cover

Sensors & Transducers Journal 2008

Sensors & Transducers Journal 2007

2000-2002 S&T e-Digest Contents

2003 S&T e-Digest Contents

2004 S&T e-Digest Contents

2005 S&T e-Digest Contents

2006 S&T e-Digest Contents


Best Articles 2008




MEMS: From Micro Devices to Wireless Systems

Vol. 7, Special Issue, October 2009, pp.25-33





Micro-fabricated Rotational Actuators for Electrical Voltage Measurements Employing the Principle of Electrostatic Force


1,2 Jan Dittmer, 2Rolf Judaschke and 1Stephanus Büttgenbach

1 Institute for Microtechnology (IMT), Technische Universität Braunschweig,
Alte Salzdahlumer Str. 203, 38124 Braunschweig, Germany

Tel.: +49-531-391-9747

2 Physikalisch-Technische Bundesanstalt (PTB),

Bundesallee 100, 38116 Braunschweig, Germany

E-mail: j.dittmer@tu-bs.de



Received: 28 August 2009   /Accepted: 28 September 2009   /Published: 12 October 2009


Abstract: In this paper, we present an advanced RMS voltage sensor based on rotating parallel-plate capacitors based on the principle of electrostatic force. The actuator is built using a micromechanical thin bulk silicon batch process yielding structures with a high sensitivity mainly due to a low mechanical spring constant, realized with thin and long beams. Metal layers provide separated excitation and sensing electrodes. The actuator is anodically bonded on a matching glass substrate with a shallow rectangular cavity in which the opposite electrodes are located and which defines the working distance to be as low as 2.5 μm. To avoid stiction, bumpers with a small contact area physically prevent short circuiting under pull-in conditions and thus improve the reliability. Finally design choices and the micromechanical fabrication process are explained. Moreover, DC and RF characterization results of the devices are presented showing successful operation from below 10 Hz up to more than 1 MHz.


Keywords: MEMS, Metrology, RMS voltage sensor, High-frequency Measurements, Bulk silicon, Anodic bonding, Batch process


Acrobat reader logo Click <here> or title of paper to download the full pages article (964 Kb)





1999 - 2009 Copyright ©, International Frequency Sensor Association (IFSA). All Rights Reserved.

Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - Membership - Submit Press Release

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - e-Shop - Site Map