MEMS: From Micro Devices to Wireless Systems

Vol. 7, Special Issue, October 2009, pp.34-46

Nanochip: a MEMS-Based Ultra-High Data Density Memory Device

¹Nickolai BELOV, ¹Donald ADAMS, ¹Peter ASCANIO, ²Tsung-Kuan CHOU,
²John HECK, ¹Byong KIM, ¹Gordon KNIGHT, ²Qing MA, ²Valluri RAO,
¹Jong-Seung PARK, ¹Robert STARK, ¹Ghassan TCHELEPI

¹ Nanochip Inc., 48041 Fremont Blvd., 94538. USA

² Intel Corporation, 2200 Mission Blvd., Santa Clara, 95054, USA

E-mail: nickolai_belov@sbcglobal.net

Received: 28 August 2009   /Accepted: 28 September 2009   /Published: 12 October 2009

Abstract: The paper provides an overview of successful development of MEMS micro-mover with large range of motion and an array of cantilevers with sharp tips (read-write heads) for a probe storage device. Approaches used for integration of memory material into the MEMS process and integration of MEMS cantilever process with CMOS are briefly discussed.

Keywords: Probe storage, CMOS-MEMS integration, Micro-mover, Cantilevers, Electromagnetic actuator, Electrostatic actuator

Click <here> or title of paper to download the full pages article (1.02 Mb)

1999 - 2009 Copyright ©, International Frequency Sensor Association (IFSA). All Rights Reserved.

Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - Membership - Submit Press Release

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - e-Shop - Site Map