Bullet Sensors & Transducers e-Digest, Vol. 144, Issue 9, September 2012: Product News

    (ISSN 1726-5479)



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16 Bit Capacitive Sensor Signal Interface IC for MEMS
based Pressure Sensors



Micro Analog Systems Oy introduces MAS6512, a 16 Bit Capacitive Sensor Signal Interface IC primarily intended for MEMS based pressure sensor modules.


The device uses a ratiometric AD-converter principle employing a delta-sigma conversion technique, giving very good noise performance. Its current consumption is extremely low (1.9 1A) and it can operate at low supply voltage from 1.8 V to 3.6 V which makes it an ideal solution for interfacing a capacitive sensor in power consumption critical portable applications. The resolutionof the ADC is 14-bits. The over sampling ratio (OSR) of the Delta-Sigma converter has five values to choose from for further optimization between conversion accuracy, speed and current consumption. MAS6512 capacitive sensor interface IC can interface both single and dual capacitance sensors. It has internal temperature sensor for temperature measurement and temperature compensation purposes. The MAS6512 communicates via a standard 2-wire I2C and 4-wire SPI bus interface.




  • Single and Differential Capacitive Sensors

  • Sensor Offset and Gain Adjustment

  • Changing Capacitance Range 2pF30pF

  • Internal Offset Capacitance

  • External Capacitance up to 40pF (or higher using external clock)

  • Resolution 14 bit (OSR=4096, DC=20pF)

  • Internal Clock Oscillator

  • On Chip Temperature Sensor -40

  • Low Voltage Operation 1.8 V3.6 V

  • Low Supply Current: 1.9 μA...28 μA

  • Conversion Time 5.8ms...82.6ms (12Hz...173Hz)

  • 16-bit RatiometricDS CDC

  • Internal 256-bit EEPROM Calibration Memory

MAS6512 circuit diagram


MAS6512 Circuit Diagram.



MAS6512 is available in a QFN-16 4x4x0.75 package as well as tested wafers or dies in waffle

pack. For further information and samples please contact Micro Analog Systems Oy.







Marja Pesonen
Sales Assistant
Micro Analog Systems Oy
Kutomotie 16
00380 Helsinki, Finland
Tel.: +358 10 835 1100

Fax: +358 10 835 1119
E-mail: Marja.Pesonen@mas-oy.com


Capacitive Sensor Signal Interface

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