Fabrication and properties of PZT micro cantilevers using isotropic silicon dry etching process by XeF2 gas for release process
Pages 1-7
Joon-Shik Park, Hyo-Derk Park and Sung-Goon Kang
Abstract
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Fabrication and test of a micro electromagnetic actuator
Pages 8-16
Ki Hoon Kim, Hyeun Joong Yoon, Ok Chan Jeong and Sang Sik Yang
Abstact
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Measurement of the mechanical properties of electroplated gold thin films using micromachined beam structures
Pages 17-27
Chang-Wook Baek, Yong-Kweon Kim, Yoomin Ahn and Yong-Hyup Kim
Abstract
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Intelligent actuation strategy for a three-DOF four-wire type optical pickup
Pages 28-40
Paul C. -P. Chao, Cheng-Liang Lai and Jeng-Sheng Huang
Abstract
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Error correction for transformed concave and convex MAGFETs with dc supply voltage
Pages 41-49
Guo-Ming Sung
Abstract
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Polymer micromachined multimodal tactile sensors
Pages 50-61
Jonathan Engel, Jack Chen, Zhifang Fan and Chang Liu
Abstract
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Air-gap type film bulk acoustic resonator using flexible thin substrate
Pages 62-70
Yu-Ri Kang, Sung-Chul Kang, Kyeong-Kap Paek, Yong-Kook Kim, Soo-Won Kim and
Byeong-Kwon Ju
Abstract
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Modeling, design and fabrication of a triple-layered capacitive pressure sensor
Pages 71-81
Min-Xin Zhou, Qing-An Huang and Ming Qin
Abstract
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Investigation of the fiber-to-planar waveguide coupler as a sensor for measuring the optical properties of metal films
Pages 82-87
Kwang Taek Kim, In Soo Jung, Jae Pyung Mah and Kyung-Rak Sohn
Abstract
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New implementation of high-precision and instant-response air thermometer by ultrasonic sensors
Pages 88-94
Wen-Yuan Tsai, Chih-Feng Huang and Teh-Lu Liao
Abstract
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A dual-mode surface encoder for position measurement
Pages 95-102
W. Gao, S. Dejima and S. Kiyono
Abstract
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Athermal fibre Bragg grating strain gauge with metal coating in measurement of thermal expansion coefficient
Pages 103-109
Yu-Lung Lo, Yong-Chang Lin and Yung-Mien Chen
Abstract
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Preparation of 128 element of IR detector array based on vanadium oxide thin films obtained by ion beam sputtering
Pages 110-114
S. B. Wang, B. F. Xiong, S. B. Zhou, G. Huang, S. H. Chen and X. J. Yi
Abstract
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Tunable passband T-filter with electrostatically-driven polysilicon micromechanical resonators
Pages 115-120
Dimitri Galayko, Andreas Kaiser, Bernard Legrand, Lionel Buchaillot, Dominique Collard and Chantal Combi
Abstract
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Electronic interface for the accurate read-out of resistive sensors in low voltage–low power integrated systems
Pages 121-126
Christian Falconi, Corrado Di Natale, Arnaldo D’Amico and Marco Faccio
Abstract
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Low cost curvature correction of bandgap references for integrated sensors
Pages 127-136
Christian Falconi, Arnaldo D’Amico, Corrado Di Natale and Marco Faccio
Abstract
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The effect of intermediate anneal on the ferroelectric properties of direct-patternable PZT films
Pages 137-142
Jae-Seob Hwang, Woo Sik Kim, Hyung-Ho Park and Tae-Song Kim
Abstract
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Anisotropy in fracture of single crystal silicon film characterized under uniaxial tensile condition
Pages 143-150
Xueping Li, Takashi Kasai, Shigeki Nakao, Taeko Ando, Mitsuhiro Shikida, Kazuo Sato and Hiroshi Tanaka
Abstract
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Comparison of the Young’s modulus of polysilicon film by tensile testing and nanoindentation
Pages 151-158
Chung-Seog Oh, Hak-Joo Lee, Soon-Gyu Ko, Shin-Woo Kim and Hyun-Gyun Ahn
Abstract
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Constitutive relations for piezoelectric benders under various boundary conditions
Pages 159-167
Jong-Kyu Park and Won-Kyu Moon
Abstract
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Development of a MEMS based colloid thruster with sandwich structure
Pages 168-172
Jijun Xiong, Zhaoying Zhou, Dong Sun and Xiongying Ye
Abstract
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Characteristics comparison of planar stages using repulsive and attractive type of surface actuator principle
Pages 173-182
Kwang Suk Jung and Yoon Su Baek
Abstract
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Journal : SENSORS AND ACTUATORS A: PHYSICAL