A new method of position measurement using ultrasonic array sensor without angular scanning
Pages 1-5
Kaoru Yamashita, Latpasamixay Chamsomphou, Hiroki Nishimoto and Masanori Okuyama
Abstract
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Design, fabrication and operation of MEMS gimbal gyroscope
Pages 6-15
Kazusuke Maenaka, Sunao Ioku, Nobuhiro Sawai, Takayuki Fujita and Yoichiro Takayama
Abstract
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Dual-axis MEMS mirror for large deflection-angle using SU-8 soft torsion beam
Pages 16-21
Takayuki Fujita, Kazusuke Maenaka and Yoichiro Takayama
Abstract
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Flux target: actuators and simulations
Pages 22-30
E. Zerrik and A. Kamal
Abstract
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A liquid-in-glass thermometer read by an interferometer
Pages 31-34
Robert David and Ian W. Hunter
Abstract
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Wireless bimorph micro-actuators by pulsed laser heating
Pages 35-43
Li-Hsin Han and Shaochen Chen
Abstract
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Synchronization problem in delay-line oscillator SAW sensors
Pages 44-51
Duck-bong Seo, Carmen Chicone and Z.C. Feng
Abstract
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Package-free infrared micro sensor using polysilicon thermopile
Pages 52-58
M. Boutchich, K. Ziouche, M. Ait-Hammouda Yala, P. Godts and D. Leclercq
Abstract
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A continuous cell separation chip using hydrodynamic dielectrophoresis (DEP) process
Pages 59-65
Il Doh and Young-Ho Cho
Abstract
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Frequency-domain characterization of magnetoelastic sensors: a
microcontroller-based instrument for spectrum analysis using a
threshold-crossing counting technique
Pages 66-71
Kefeng Zeng, Maggie Paulose, Keat G. Ong and Craig A. Grimes
Abstract
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A robust semi-digital readout method for crosstalk elimination in resonant sensors
Pages 72-77
Henrik Rödjegård and Gert I. Andersson
Abstract
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Accuracy and resolution of direct resistive sensor-to-microcontroller interfaces
Pages 78-87
Ferran Reverter, Josep Jordana, Manel Gasulla and Ramon Pallàs-Areny
Abstract
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Optimization of scalar magnetic gradiometer signal processing
Pages 88-94
Lev Frumkis, Boris Ginzburg, Nizan Salomonski and Ben-Zion Kaplan
Abstract
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| | | Materials and Technology Section |
In-situ crystal growth monitoring using a CCD imaging system
Pages 95-102
H. Sghaier, L. Bouzaiene, L. Sfaxi and H. Maaref
Abstract
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Processing and thickness effects on the microstructure and electrical properties of sol–gel deposited
Pb(Zr, Ti)O3 films
Pages 103-112
Jing Yang and Luo Jianbin
Abstract
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Projection micro-stereolithography using digital micro-mirror dynamic mask
Pages 113-120
C. Sun, N. Fang, D.M. Wu and X. Zhang
Abstract
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The effect of anisotropic wet etching on the surface roughness
parameters and micro/nanoscale friction behavior of Si(1 0 0)
surfaces
Pages 121-130
S. Chandrasekaran, J. Check, S. Sundararajan and P. Shrotriya
Abstract
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Structural and composition analysis of GaN films deposited by cyclic-PLD at different substrate temperatures
Pages 131-135
P. Sanguino, O.M.N.D. Teodoro, M. Niehus, C.P. Marques, A.M.C. Moutinho, E. Alves and R. Schwarz
Abstract
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Position dependent inductance based on magnetic shape memory materials
Pages 136-141
I. Suorsa, E. Pagounis and K. Ullakko
Abstract
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Piezoelectric properties of low-temperature sintering Pb(Co1/2W1/2)O3–Pb(Mn1/3Nb2/3)O3–Pb(Zr0.48Ti0.52)O3 ceramics with the sintering temperature and the amount of CuO addition
Pages 142-147
Kwanghyun Chung, Duckchool Lee, Juhyun Yoo, Yeongho Jeong, Hyeunggyu Lee and Hyungwon Kang
Abstract
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Orientation relationships between electromechanical properties of monoclinic 0.91Pb(Zn1/3Nb2/3)O3–0.09PbTiO3 single crystals
Pages 148-155
V.Yu. Topolov
Abstract
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Design and test of a high-performance piezoelectric micropump for drug delivery
Pages 156-161
Kan Junwu, Yang Zhigang, Peng Taijiang, Cheng Guangming and Wu Boda
Abstract
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A slim type microvalve driven by PZT films
Pages 162-171
Hyonse Kim, Chihyun In, Gilho Yoon and Jongwon Kim
Abstract
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Impact of environmental parameters on the emission intensity of micromachined infrared sources
Pages 172-180
Olaf Schulz, Gerhard Müller, Martin Lloyd and Alain Ferber
Abstract
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A micro-machining-based digital variable optical attenuator
Pages 181-186
Zhonghui Cao and X. Wu
Abstract
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A single-pole double-throw (SPDT) circuit using lateral metal-contact micromachined switches
Pages 187-196
M. Tang, A.-Q. Liu, A. Agarwal, Z.-S. Liu and C. Lu
Abstract
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Piezoelectrically actuated ejector using PMN–PT single crystal
Pages 197-202
K.H. Lam, H.L.W. Chan, H.S. Luo, Q.R. Yin and Z.W. Yin
Abstract
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An electrode analysis for multilayer ceramic actuators
Pages 203-212
Bao-Lin Wang and Yiu-Wing Mai
Abstract
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Displacement amplification and resonance characteristics of the cymbal transducers
Pages 213-220
Cheng-Liang Sun, S.S. Guo, W.P. Li, Z.B. Xing, G.C. Liu and X.-Z. Zhao
Abstract
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Coil configuration design for the Lorentz force maximization by the
topology optimization method: applications to optical pickup coil
design
Pages 221-229
Woochul Kim, Jae Eun Kim and Yoon Young Kim
Abstract
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Linearization of the scanning field for 2D torsional micromirror by RBF neural network
Pages 230-236
Yi Zhao, Francis E.H. Tay, Fook Siong Chau and Guangya Zhou
Abstract
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Dynamics of MEMS electrostatic driving using a photovoltaic source
Pages 237-242
Sandra Bermejo and Luis Castañer
Abstract
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Active vibration isolation of a large stroke scanning probe microscope by using discrete sliding mode control
Pages 243-250
Jia-Yush Yen, Kuo-Jung Lan and John A. Kramar
Abstract
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A MEMS multi-sensor chip for gas flow sensing
Pages 253-261
Yong Xu, Chen-Wei Chiu, Fukang Jiang, Qiao Lin and Yu-Chong Tai
Abstract
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Self-sensing tapping mode atomic force microscopy
Pages 262-266
J.D. Adams, L. Manning, B. Rogers, M. Jones and S.C. Minne
Abstract
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Development, characterization, and theoretical evaluation of electroactive polymer-based micropump diaphragm
Pages 267-274
Tian-Bing Xu and Ji Su
Abstract
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Broadband MEMS shunt switches using PZT/HfO2 multi-layered high k dielectrics for high switching isolation
Pages 275-281
Jiunnjye Tsaur, Kazumasa Onodera, Takeshi Kobayashi, Zhang-Jie Wang, Sven Heisig, Ryutaro Maeda and Tadatomo Suga
Abstract
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Micro-mechanical switch array for meso-scale actuation
Pages 282-293
Eniko T. Enikov and Kalin V. Lazarov
Abstract
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Journal: SENSORS AND ACTUATORS A: PHYSICAL