Micromachined actuators with braking mechanisms
Pages 1-8
John D. Grade, Kevin Y. Yasumura and Hal Jerman Abstract
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A thermal bimorph micromirror with large bi-directional and vertical actuation
Pages 9-15
Ankur Jain, Hongwei Qu, Shane Todd and Huikai Xie Abstract
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MEMS power generator with transverse mode thin film PZT
Pages 16-22
Y.B. Jeon, R. Sood, J.-h. Jeong and S.-G. Kim Abstract
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Application of parametric resonance amplification in a single-crystal silicon micro-oscillator based mass sensor
Pages 23-30
Wenhua Zhang and Kimberly L. Turner Abstract
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Micromachined resonant multiple gas sensor
Pages 31-38
Anis Zribi, Aaron Knobloch, Wei-Cheng Tian and Stacey Goodwin Abstract
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Strain sensors of shape memory alloys using acoustic emissions
Pages 39-44
Ryutaro Oishi and Hideki Nagai Abstract
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Dynamic characterization of silicon-based microstructure of high aspect ratio by dual-prism UV laser system
Pages 45-54
C.T. Pan, Y.M. Hwang and C.W. Hsieh Abstract
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A study of the geometry of microball lens arrays using the novel batch-fabrication technique
Pages 55-63
C.H. Chien, C.T. Pan, C.C. Hsieh, C.M. Yang and K.L. Sher Abstract
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Sensitivity of plastic scintillating fiber optic for X and γ radiation, a simulation study
Pages 64-67
Mohammad M. Nasseri, Ma Qingli and Yin Zejie Abstract
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3D vision inspection for internal surface based on circle structured light
Pages 68-75
Guangjun Zhang, Junji He and Xiuzhi Li Abstract
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Using a cat's eye cavity to improve displacement self-sensing laser
Pages 76-82
Wenhua Du, Yan Li, Shulian Zhang, Rui Suo and Xinjun Wan Abstract
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Novel displacement eddy current sensor with temperature compensation for electrohydraulic valves
Pages 83-87
Qipeng Li and Fan Ding Abstract
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Flexible and extendible neural interface device based on cooperative multi-chip CMOS LSI architecture
Pages 88-98
Takashi Tokuda, Yi-Li Pan, Akihiro Uehara, Keiichiro Kagawa, Masahiro Nunoshita and Jun Ohta Abstract
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Development and experimental consideration of SMA/CFRP actuator for vibration control
Pages 99-107
Kaori Yuse and Yoshihiro Kikushima Abstract
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Fabrication of vanadium oxide micro-optical switches
Pages 108-112
Hongchen Wang, Xinjian Yi, Sihai Chen and Xiaochao Fu Abstract
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A MEMS-based solid propellant microthruster with Au/Ti igniter
Pages 113-123
K.L. Zhang, S.K. Chou, S.S. Ang and X.S. Tang Abstract
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Hysteresis and creep compensation for piezoelectric actuator in open-loop operation
Pages 124-130
Ru Changhai and Sun Lining Abstract
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A novel valve-less synthetic-jet-based micro-pump
Pages 131-140
Zhen-bing Luo and Zhi-xun Xia Abstract
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Microfluidic circulatory flows induced by resonant vibration of diaphragms
Pages 141-148
Ling-Sheng Jang, Shih-Hui Chao, Mark R. Holl and Deirdre R. Meldrum Abstract
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Single-disk and double-disk viscous micropumps
Pages 149-158
Danny Blanchard, Phil Ligrani and Bruce Gale Abstract
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An analytical model of a silicon MEMS vaporizing liquid microthruster and some experimental studies
Pages 159-166
D.K. Maurya, S. Das and S.K. Lahiri Abstract
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3D numerical micro-cooling analysis for an electrohydrodynamic micro-pump
Pages 167-176
Chia-Wen Lin and Jiin-Yuh Jang Abstract
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