Journal: SENSORS AND ACTUATORS A: PHYSICAL
ISSN: 0924-4247 Vol.176/1
Date: April 2012
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Physical Section
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Interfaces Section
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Pages 78-89 Michael Karpelson, Gu-Yeon Wei, Robert J. Wood
Materials & Technology Section
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Actuator Section
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Micromechanics Section
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Systems/Applications Section
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