Journal Sensors and Actuator A: Physical, Vol. 177, Issue 1

Journal: SENSORS AND ACTUATORS A: PHYSICAL

ISSN: 0924-4247 Vol.177/1

24th IEEE International Conference on Micro Electro Mechanical Systems

Edited by J.E. Wood

Date: April 2012

Editorial Board
Page i

Design and characterization of MEMS micromotor supported on low friction liquid bearing
Pages 1-9
Mei Lin Chan, Brian Yoxall, Hyunkyu Park, Zhaoyi Kang, Igor Izyumin, Jeffrey Chou, Mischa M. Megens, Ming C. Wu, Bernhard E. Boser, David A. Horsley

An array of microliter-sized microbial fuel cells generating 100 μW of power
Pages 10-15
Seokheun Choi, Junseok Chae

Microfabrication of compliant all-polymer MEMS thermal actuators
Pages 16-22
Aaron P. Gerratt, Sarah Bergbreiter

Miniature conductive polymer actuators for high pressure generation in lab on chip systems
Pages 23-29
M. Hiraoka, P. Fiorini, J. O’Callaghan, I. Yamashita, C. Van Hoof, M. Op de Beeck

Structural optimization of contact electrodes in microbial fuel cells for current density enhancements
Pages 30-36
Shogo Inoue, Erika A. Parra, Adrienne Higa, Yingqi Jiang, Pengbo Wang, Cullen R. Buie, John D. Coates, Liwei Lin

PMN–PT (lead magnesium niobate–lead titanate) piezoelectric material micromachining by excimer laser ablation and dry etching (DRIE)
Pages 37-47
Ioan Alexandru Ivan, Joël Agnus, Pierre Lambert

A tactile sensing array with tunable sensing ranges using liquid crystal and carbon nanotubes composites
Pages 48-53
Yu-Tse Lai, Yung-Ming Chen, Tyng Liu, Yao-Joe Yang

Micro PEM fuel cell system with NaBH₄ hydrogen generator

Pages 54-59
Jongkwang Lee, Taegyu Kim

10.

Bubble time-of-flight: A simple method for measuring microliter per minute flows without calibration
Pages 60-66
Julian M. Lippmann, Albert P. Pisano

11.

Foucault pendulum on a chip: Rate integrating silicon MEMS gyroscope
Pages 67-78
Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel

12.

Parametric resonance: Amplification and damping in MEMS gyroscopes
Pages 79-86
Mrigank Sharma, Elie Hanna Sarraf, Rajashree Baskaran, Edmond Cretu

13.

Patterning piezoelectric thin film PVDF–TrFE based pressure sensor for catheter application
Pages 87-92
Tushar Sharma, Sang-Soo Je, Brijesh Gill, John X.J. Zhang

14.

Fabrication and characterization of electrostatic oscillators based on CNT bundles
Pages 93-98
Pengbo Wang, Xiaojun Yan, Yingqi Jiang, Liwei Lin

15.

Gamma and electron beam irradiation effects on the resistance of micromachined polycrystalline silicon beams
Pages 99-104
Lei Wang, Jieying Tang, Qing-An Huang

16.

Application of silane-free atmospheric-plasma silicon deposition to MEMS devices

Pages 105-109
Yoshinori Yokoyama, Takaaki Murakami, Shinichi Izuo, Yukihisa Yoshida, Toshihiro Itoh

17.

Editorial Board Page i

Design and characterization of MEMS micromotor supported on low friction liquid bearing Pages 1-9 Mei Lin Chan, Brian Yoxall, Hyunkyu Park, Zhaoyi Kang, Igor Izyumin, Jeffrey Chou, Mischa M. Megens, Ming C. Wu, Bernhard E. Boser, David A. Horsley

An array of microliter-sized microbial fuel cells generating 100 μW of power Pages 10-15 Seokheun Choi, Junseok Chae

Microfabrication of compliant all-polymer MEMS thermal actuators Pages 16-22 Aaron P. Gerratt, Sarah Bergbreiter

Miniature conductive polymer actuators for high pressure generation in lab on chip systems Pages 23-29 M. Hiraoka, P. Fiorini, J. O’Callaghan, I. Yamashita, C. Van Hoof, M. Op de Beeck

Structural optimization of contact electrodes in microbial fuel cells for current density enhancements Pages 30-36 Shogo Inoue, Erika A. Parra, Adrienne Higa, Yingqi Jiang, Pengbo Wang, Cullen R. Buie, John D. Coates, Liwei Lin

PMN–PT (lead magnesium niobate–lead titanate) piezoelectric material micromachining by excimer laser ablation and dry etching (DRIE) Pages 37-47 Ioan Alexandru Ivan, Joël Agnus, Pierre Lambert

A tactile sensing array with tunable sensing ranges using liquid crystal and carbon nanotubes composites Pages 48-53 Yu-Tse Lai, Yung-Ming Chen, Tyng Liu, Yao-Joe Yang

Micro PEM fuel cell system with NaBH4 hydrogen generator

Bubble time-of-flight: A simple method for measuring microliter per minute flows without calibration Pages 60-66 Julian M. Lippmann, Albert P. Pisano

Foucault pendulum on a chip: Rate integrating silicon MEMS gyroscope Pages 67-78 Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel

Parametric resonance: Amplification and damping in MEMS gyroscopes Pages 79-86 Mrigank Sharma, Elie Hanna Sarraf, Rajashree Baskaran, Edmond Cretu

Patterning piezoelectric thin film PVDF–TrFE based pressure sensor for catheter application Pages 87-92 Tushar Sharma, Sang-Soo Je, Brijesh Gill, John X.J. Zhang

Fabrication and characterization of electrostatic oscillators based on CNT bundles Pages 93-98 Pengbo Wang, Xiaojun Yan, Yingqi Jiang, Liwei Lin

Gamma and electron beam irradiation effects on the resistance of micromachined polycrystalline silicon beams Pages 99-104 Lei Wang, Jieying Tang, Qing-An Huang