Journal : SENSORS AND ACTUATORS A: PHYSICAL
ISSN : 0924-4247 Vol./Iss. : 70 / 1-2
Fabrication and experiment of a planar micro ion drag pump Ahn , Si-Hong pp.: 1-5 Optical power induced damage to microelectromechanical mirrors Burns , David M. pp.: 6-14 Multichip module packaging of microelectromechanical systems Butler , Jeffrey T. pp.: 15-22 Electrothermal actuators fabricated in four-level planarized surface-micromachined polycrystalline silicon Comtois , John H. pp.: 23-31 Compact analytical modeling of squeeze film damping with arbitrary venting conditions using a Green's function approach, Darling , Robert B. pp.: 32-41 Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications Dellmann , L. pp.: 42-47 PECVD silicon carbide as a chemically resistant material for micromachined transducers Flannery , Anthony F. pp.: 48-55 Dynamic simulation of an electrostatic micropump with pull-in and hysteresis phenomena Franc[cedil]ais , Olivier pp.: 56-60 Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures Gui , C. pp.: 61-66 Theoretical and experimental study of linear motors using surface acoustic waves He'lin , Philippe pp.: 67-74 Conformal coating by photoresist of sharp corners of anisotropically etched through-holes in silicon Heschel , Matthias pp.: 75-80 Micronozzle/diffuser flow and its application in micro valveless pumps Jiang , X.N. pp.: 81-87 Bridge configuration of piezoresistive devices for scanning force microscopes Jumpertz , R. pp.: 88-91 A compact and quick-response dynamic focusing lens Kaneko , Takashi pp.: 92-97 A novel micromachined pump based on thick-film piezoelectric actuation Koch , Michael pp.: 98-103 Linear microactuators based on the shape memory effect Kohl , M. pp.: 104-111 A triangular electrostatic comb array for micromechanical resonant frequency tuning Lee , Ki Bang pp.: 112-117 Optimization-based synthesis of microresonators Mukherjee , Tamal pp.: 118-127 A silicon microsuspension for disk drive applications Narbutovskih , M. pp.: 128-134 Design of a shape memory actuated endoscopic tip Peirs , Jan pp.: 135-140 Realization, characterization of micro pyrotechnic actuators and FEM modelling of the combustion ignition Rossi , Carole pp.: 141-147 Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip Sato , Kazuo pp.: 148-152 AMANDA---low-cost production of microfluidic devices Schomburg , W.K. pp.: 153-158 Thin Teflon-like films for eliminating adhesion in released polysilicon microstructures Smith , Bradley K. pp.: 159-163 Low-temperature direct bonding of silicon and silicon dioxide by the surface activation method Takagi , Hideki pp.: 164-170 Modeling, design and testing of the electrostatic shuffle motor Tas , Niels pp.: 171-178 Silicon-to-silicon wafer bonding using evaporated glass Weichel , Steen pp.: 179-184 Determination of the modification of Young's modulus due to Joule heating of polysilicon microstructures using U-shaped beams, Yang , E.H. pp.: 185-190 Low-cost PDMS seal ring for single-side wet etching of MEMS structures Brugger , J. pp.: 191-194 Polysilicon optical microscanners for laser scanning displays Kiang , Meng-Hsiung pp.: 195-199 |
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