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Articles, Papers and References

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Beeby S.P., Grabham N.J., White N.M., Micromachined Accelerometer with microprocessor controlled self-test procedure, Sensor Review, Vol.21, No.1, 2001, pp.33-37.

Abstract: This paper describes a self-test procedure for a micromachined silicon accelerometer realized using a commercially available microprocessor. The accelerometer is fabricated using a combination of thick-film printing and silicon micromachining. The self-test procedure must be performed at resonance and the microprocessor is used to identify the individual resonant frequency of each device and confirm the operation of the PZT elements. The microprocessor could also be used in the future to fully test and calibrate the device thereby ensuring correct and accurate operation.

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J. Kramer, R. Sarpeshkar and C. Koch, Pulse-based analog VLSI velocity sensors, IEEE Trans. Circuits and Systems-II: Analog and Digital Signal Processing 44 (1997) 86-101.

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