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Pressure Sensors News                                                                                                 Last Up-date: 04/01/20 17:05:45



 New Freescale Xtrinsic Pressure Sensor Simplifies System Design for Location-based Services - Freescale Semiconductor [NYSE: FSL] introduces a new high-precision pressure sensor for altitude detection designed to help users further leverage advanced navigation capabilities and emerging location-based services such as GPS assist and e911. The Freescale Xtrinsic MPL3115A2 pressure sensor, based on micro-electromechanical systems (MEMS) technology, complements the accelerometers and magnetometers in the Xtrinsic portfolio to meet the growing demand for these types of components in smart mobile devices ...




Articles, Papers and References

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K. Mutamba, M. Flath 1 , A. Sigurdardóttir and A. Vogt A., GaAs Pressure Sensor with Frequency Output Based on Resonant Tunneling Diodes (in PDF)

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A. Häberli, O. Paul, P. Malcovati, M. Faccio, F. Maloberti, and H. Baltes, "CMOS Integration of a Thermal Pressure Sensor System", Proceedings of IEEE International Symposium on Circuits and System (ISCAS `96),  vol. I, Atlanta, USA, pp. 377-380, 1996.

Abstract - We report the integration of a CMOS thermal pressure sensor system for the range of 102 to 106 Pa. The operating principle of the sensor is based on the pressure-dependent heat transfer across the air gap separating a heat source from a heat sink. After completion of the double metal CMOS process the sensor structure is obtained by a fully CMOS-compatible sacrificial metal etching. The microsystem includes both sensor and a readout circuit. The interface circuit compensates for temperature effects and provides a bitstream at the system output representing the ambient pressure.


V.S.Beshliu, V.G. Kantser, L.N.Beldiman, Integral Gauge Pressure Sensor with Frequency Output Signal, In Proceedings of International Semiconductor Conference (CAS'99), Sinaia, Romania, 5-9 October, 1999, vol.2, pp. 491- 494.


S.Chatzandroulis, D.Tsoukalas, P.A. Neukomm, A Passive Telemetry System with a Capacitive Silicon Sensor Suitable for Blood Pressure Measurements, In Proceedings of the 10th International Conference on Solid-State Sensors and Actuators (Transducers '99), Sendai, Japan, 7-10 June, 1999, vol.2, pp.1038-1041.


A. Hanneborg, T.E. Hansen, P.A. Ohlckers, E. Carlson, B. Dahl and O. Holwech, An Integrated Capacitive Pressure Sensor with Frequency-modulated Output, Sensors and Actuators, 9, 1986, pp. 345-351.


Sugiyama, S., M. Takigawa, and I. Igarashi, Integrated Piezoresistive Pressure Sensor with both Voltage and Frequency Output, Sensors and Actuators, 4, 1983, pp. 113-120.


S. Chatzandroulis, D.Tsoukalas, P.A. Neukomm, A Pressure Measuring System Using Passive Telemetry and Silicon Capacitive Sensor, In Proceedings of the 13th European Conference on Solid-State Transducers (EUROSENSORS XIII), The Hague, The Netherlands, 12-15 September, 1999, pp.913-916.


Ph. Ménini, Ph.Dondon, G.Blasquez and P.Pons, Modelling of a Capacitance-to-Period Converter Dedicated to Capacitive Sensors,  In Proceedings of the 13th European Conference on Solid-State Transducers (EUROSENSORS XIII), The Hague, The Netherlands, 12-15 September, 1999, pp.549-552.


An 8x8 Robust Pressure Sensor Array (Microsensors Research)


M. Haueis, J. Dual, R. A. Buser, High Temperature Resonant Silicon Force and Pressure Sensor


Shuwen Guo, Jun Guo, Wen H. Ko, A Monolithically Integrated Surface Micromachined Touch Mode Capacitive Pressure Sensor, Sensors and Actuators, 80, 2000, pp.224–232


Intelligent IC Conditions Pressure-Sensor Signals


Svйda, M., Vrba, R., Benes, P., A System Architecture of Networked Pressure Sensors, In Proceedings of the 5th WSES/IEEE World Conference on Systems (CSCC2001), Rethymno, Greece, 2001, p. 3541-3546


Jeff Baum, Frequency Output Conversion for MPX2000 Serles Pressure Sensors, AN1316, Motorola


Warren Schultz, Interfacing Semiconductor Pressure Sensors to Microcomputers, MOTOROLA Semiconductor Application N ote, AN1318


Jerome M. Paros, Fiber-Optic Pressure Sensors with 0.01% Accuracy


Yurish S.Y., Intelligent Digital Pressure Sensors and Transducers Based on Universal Frequency-to-Digital Converter (UFDC-1), Sensors & Transducers Magazine, Vol. 60, Issue 10, October 2005, pp. 432-438


David Heeley, Understanding Pressure and Pressure Measurement


Eric Jacobsen, Signal Conditioning a Pressure Sensor with a Field-Programmable Analog Array, Sensors Magazine, November 1997


Robert E. Bicking, Fundamentals of Pressure Sensor Technology, Sensors Magazine, November 1998


Randy Frank, Dave Zehrbach, Testing the "System on a Chip", Sensors Magazine, September 1998


Rick Hagen, Choosing the Right Low-Pressure Sensor, Sensors Magazine, September 1998


Charles F. Malacaria, A Thin, Flexible, Matrix-Based Pressure Sensor, Sensors Magazine, September 1998


Amy Flanagan, Automating Pressure Calibration in a Metrology Laboratory, Sensors Magazine, July 1998


Cliff Fung, Rowe Harris, Terry Zhu, Multifunction Polysilicon Pressure Sensors for Process Control, Sensors Magazine, October 1999


Bernhard Konrad, Martin Ashauer, Demystifying Piezoresistive Pressure Sensors, Sensors Magazine, July 1999


W.S. Czarnocki,  J.P. Schuster, The Evolution of Automotive Pressure Sensors, Sensors Magazine, May 1999


Ken Hartman, Ernest D. Schmidt, Pressure Sensor Interchangeability, Sensors Magazine, January 1999


Gordon Bitko, Andrew McNeil, Randy Frank, Improving the MEMS Pressure Sensor, Sensors Magazine, July 2000


Michel Chevroulet, A Pressure Sensor for a Smart Barometer, Sensors Magazine, May 2000


Michael L. Dunbar, Karsten Sager, A Novel, Media-Compatible Pressure Sensor for Automotive Applications, Sensors Magazine, January 2000


Reno Suffi, Semiconductor-Based Pressure Sensors for Semiconductor Fabrication, Sensors Magazine, January 2000


Mark Parsons, Design and Manufacture of Automotive Pressure Sensors, Sensors Magazine, April 2001


Alec Makdessian, Mark Parsons, DSSP-Based Pressure Sensors, Sensors Magazine, January 2001


Dragan Mladenovic, Rajan Verma, Bringing MEMS Pressure Sensors to Market - Fast, Sensors Magazine, January 2001


Jon Wilson, Fundamentals of Pressure Sensing, Sensors Magazine, July 2002


Benjamin J. D’Acunto, William S. Kosh, A Low Differential Pressure Transmitter for HVAC Applications, Sensors Magazine, January 2002


Richard Markell, Water Tank Pressure Sensing, a Fluid Solution, Note: APP-108, August 1997


Amit Patel, Manish Kothari, John G. Webster, Willis J. Tompkins, Jacqueline J. Wertsch, A Capacitance Pressure Sensor Using a Phase-Locked Loop, Journal of Rehabilitation Research and Development, Vol.26, No.2, Spring 1989, pp. 55-62.


Lorens TodsenMax Robinson, Choosing the Right Pressure Transmitter: Which Technology Is Right for Your Application? Sensors, June 2007


Eric Jacobsen and Jeff Baum, Using a Pulse Width Modulated Output with Semiconductor Pressure Sensors, Freescale Semiconductor, Application Note, AN1518, 2005


Blair Chalpin, Charles Matthews, Nicholas Sheble, Accurate Pressure Measurement, InTech, May 2007


Important Considerations in Selecting a Pressure Sensor, FUTEK, 2008.


S. Vlassis, S. Siskos, An Interfacing Circuit for Piezoresistive Pressure Sensors with Frequency Output, International Journal of Electronics, 2000, Vol. 87, No. 1, pp.119-127.





Checklist: Selecting Pressure Transducers


Pressure transducers are found in numerous OEM applications, and they are used widely in process control. The  introduction of the microprocessor has increased the functionality and expanded the use of pressure transducers over the past 15 years.


Selecting the proper pressure transducer for any application requires a close look at the following criteria:


Check box  Isolation: Should a transducer be isolated from the medium being measured ? For corrosive, high-temperature, or viscous media, isolation is generally required. Frequently, a metal or ceramic diaphragm, with possibility a fill fluid, is incorporated.


Check box  Accuracy: Pressure instrumentation is available in  a wide range of accuracies. High accuracy devices usually have improved performance both with temperature changes and over time. Greater stability comes at a premium price.


Check box Pressure range: Commonly available ranges exist from vacuum to very high pressure, with vacuum, gauge, absolute, or differential pressure references. When selecting a transducer's range, it is desirable for the application's normal operating pressure to be 50-90 % of the range chosen.


Check box Temperature effects: Temperature changes have the greatest effect on a  pressure transducer's environmental performance. Most manufacturers provide temperature compensation specification that define thermal effects 

over a given range. Performance shown as a coefficient or error band is guaranteed over that temperature range. Outside of that range, larger errors should be anticipated.


Check box Vibration/shock effects: Vibration and shock are highly application-specific environmental issues. They should reviewed for fit with manufacturer's specifications


Check box Electrical effects: "CE"- marked products usually have built-in radio frequency interference (RFI), electromagnetic interference (EMI), and electrostatic discharge (ESD) protection. These are fast becoming a requirement for usage within today's operating environments.


Check box Hydraulic Applications: When applying transducers in hydraulic systems, it may be necessary to consider use of "snubbers" to dampen hydraulic spikes. These dampening devices prevent sensor failure due to overrange readings from phenomena such as "water hammer".


Check box Outputs: Transducer outputs are available in millivolt, voltage, current, frequency and pulse number signals. Digital outputs with communication capability are available as well. The 4-20 mA output is the simplest since it is usually a two-wire configuration.


Bob Torsiello,

product manager for transducer

at NOSHOK Inc.,

Middleburg Heights, Ohio, USA 

Control Engineering Europe, Jan/Feb 2000, p.34



MEMS Pressure Sensors



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