Articles, Papers and References |
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C.J. Welham, J. Greenwood and M. Bertioli, A
Lateral Resonant Pressure Sensor Fabricated Via Fusion Bonding, Wafer
Thinning and Reactive-Ion-Etching, In Proceedings of the
12th European Conference on Solid-State Transducers and the 9th UK
Conference on Sensors and their Applications, Southampton, UK, 13-16
September 1998, EUROSENSORS XII, Ed. by N. M. White, Institute of
Physics Publishing Bristol and Philadelphia, Sensors Series, volume 1,
pp.353-356. |
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Thierry Corman, Peter Enoksson, Kjell Norén and Göran Stemme, Novel
Burst Technology for Closed Loop Detection and Exitation of Resonant
Silicon Sensors, In Proceedings of the 10th International
Conference on Solid-State Sensors and Actuators (Transducers '99),
Sendai, Japan, 7-10 June, 1999, vol.2, pp.1402-1405. |
3. |
D. Scholz, E. Peiner, A. Schlachetzki, H. Fritsch, R. Mikuta, P.
Hauptmann, A smart resonant sensor fabricated by Si-MST for online
vibration control of rotating machinery,
Proc. 26th Europ. Solid State Dev. Res. Conf. (ESSDERC '96), Bologna
(Italy), 9.-11. Sept. 1996, edited by G. Baccarani and M. Rudan,
(Editions Frontiйres, Gif-sur-Yvette, France, 1996), 721-724. |
4. |
V. Ferrary, D.Marioli, A. Taroni, E. Ranucci, Multisensor Array of Mass
Microbalances for Chemical Detection Based on Resonant Piezo-Layers of
Screen-Printed PZT, In Proceedings of the
13th European Conference on Solid-State Transducers (EUROSENSORS XIII),
The Hague, The Netherlands, 12-15 September, 1999, pp.949-952.
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5. |
Catherine Bernou, Dominique Rebière, Jacques Pistré, New Chemical
Sensors Using Microwave Resonators, In Proceedings of the
13th European Conference on Solid-State Transducers (EUROSENSORS XIII),
The Hague, The Netherlands, 12-15 September, 1999, pp.635-638. |
6. |
M.Penza, G.Cassano, Relative Humidity Sensing by PVA-Coated Dual
Resonator SAW Oscillator, In Proceedings of the
13th European Conference on Solid-State Transducers (EUROSENSORS XIII),
The Hague, The Netherlands, 12-15 September, 1999, pp.133-136. |
7. |
A.L. Dring and B.E. Jones, Integrated On-line Multisensing of Fluid Flow
Using a Mechanical Resonator, In Proceedings of the
13th European Conference on Solid-State Transducers (EUROSENSORS XIII),
The Hague, The Netherlands, 12-15 September, 1999, pp.883-886. |
8. |
Jürgen Wibbeler, Carmen Steiniger, Matthias Küchler, Klaus Wolf, Tino
Frank, Jan Mehner, Wolfram Dötzel, Thomas Gessner, Resonant Silicon
Vibration Sensors with Voltage Controlled Frequency Tuning Capability,
In Proceedings of the
13th European Conference on
Solid-State Transducers (EUROSENSORS XIII), The Hague, The Netherlands,
12-15 September, 1999, pp.791-794. |
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Haueis M., Dual J., Cavalloni C., Gnielka M.,
Buser R., Packaged bulk micromachined resonantforce sensor for high
temperature applications, SPIE - Design, Test, Integration and Packaging
of MEMS/MOEMS, Paris, May 2000, vol. 4019, 2000, pp. 379-388. |
10. |
M. Haueis, J. Dual, R. A. Buser, High
Temperature Resonant Silicon Force and Pressure Sensor |
11. |
B.
Dulmet, Design of Frequency Output Resonant Piezoelectric Sensors,
Proceedings of SPIE/Ukraine on Current Research in Optics and Photonics:
Selected Papers from the 2nd International Conference on
Advanced Optoelectronics & Lasers (2005), 12 -17 September 2005,
Yalta , Crimea, Ukraine, Ed. by I. A. Sukhoivanov, V. A. Svich, Y. S.
Shmaliy, S. A. Kostyukevych, Vol. 6, No. 1-6, 2006, pp.445-452. |
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